UHP Pressure Gauges

Holy Instruments – Product Series ID: PG316DM 

Mechanical Pressure Gauge – Ultra High Purity (UHP) Series

316L Stainless Steel + VAR Double Melt

Product Overview

Holy Instruments Mechanical Pressure Gauges are engineered for ultra-high purity (UHP) gas distribution systems where precision, reliability, and contamination-free performance are critical. Built with 316L SS and 316L SS + VAR Double Melt wetted parts, these gauges ensure maximum purity and durability in demanding environments.

Key Applications

• Semiconductor manufacturing
• Electronics
• Aerospace
• Biotechnology
• Pharmaceutical production
• Medical systems

Special Features

• Wetted parts in 316L SS or 316L SS + VAR Double Melt
• Electropolished stainless steel case, socket, and face-seal connections
• Available in negative, positive, and compound pressure ranges
• Nominal diameters: **2.0″ (50 mm) and 2.5″ (63 mm)**

Performance Specifications

Accuracy:

• ASME B40.100, (±2│1│2% Measuring Span) Grade A
• EN 837-1, (±1%) Class 1.6

Scale Range: -30 \~ 0 to 0 \~ 4000 psi (-0.1 \~ 0 to 0 \~ 28 MPa)

Working Pressure:

• Steady: 75% of full scale
• Fluctuating: 67% of full scale

Temperature Limits:

• Ambient: -40°F to +140°F (-40°C to +60°C)
• Fluid: Max. +212°F (+100°C)

Temperature Error:

±0.4% of span per 18°F (10°C) deviation from reference 68°F (20°C)

Construction & Materials

Pressure Connection: Face-seal gland (316L SS + VAR Double Melt, electropolished), Face-seal nut (316 SS)

Socket: 316L SS + VAR Double Melt, electropolished

Mounting Options: Lower Mount (LM) or Center Back Mount (CBM)

Connection Types: Swivel Male, Swivel Female, Weld Stub

Wetted Surface Finish: Ra < 0.25 μm (Ra < 10 μin)

Movement Components: Stainless Steel

Case: 304 SS, electropolished

Window: Twist-lock polycarbonate

Dial: White aluminum, stop pin, black lettering

Quality & Compliance

Helium Leak Tested: Leakage rate < 10 mbar ℓ/sec

Cleanroom Processing:

• UHP-clean for semiconductor gas service (per SEMI/SEMATECH)
• Cleaned and packed in Class 100/10 cleanroom
• Double-bagged and nitrogen-purged
• Protective cap on threaded connections

Certifications:

• ATEX II 2G Ex h IIC T6…T1 Gb
• ATEX II 2D Ex h IIIC T85°C…T450°C Db